Plasma san seng ai jak ni a laksan jai lang ai lam ni

Plasma hpe jasan jaseng/etching galaw ai jak ni gaw, wan n-gun n-gun hpe pat da ai hka htung kata de electrode lahkawng hpe bang nna, wan n-gun n-gun hpe shabyin ya ai. Vacuum pump hpe vacuum madang langai ngai hpe n-gun jaw na matu lang ai. Gas gaw grau grau n-gun yawm wa ai hte maren, molecule lapran na tsan gang ai lam hte molecule (sh) ion ni a lawt lu ai shamu shamawt lam mung grau grau jat wa ai. Wan n-gun a npu hta, dai ion ni gaw shingjawng hkat nna, plasma byin pru wa ai. Ndai ion ni gaw grai n-gun ja ai, chemical bond yawng ngu na daram hpe dawm kau lu ai n-gun atsam nga ai, gara n-gun rawng ai shara hta raitim chemical reaction ni hpe shabyin ya lu ai. Gas plasma amyu myu hta chemical n bung ai. Ga shadawn, oxygen plasma gaw grai oxidize galaw lu ai majaw, photoresist hpe oxidize galaw nna gas hpe shapraw lu ai majaw, san seng ai akyu hpe lu la mai ai. Hkru kat ai gas plasma gaw grai kaja ai anisotropy nga ai, dai gaw etching galaw na matu ra kadawn ai lam ni hpe hkan sa lu ai. Plasma tsi lajang ai shaloi nhtoi pru wa ai majaw, nhtoi pru ai ngu shamying ai.
Plasma hpe jasan jaseng ai ladat gaw, plasma kata na active particles ni hpe "activation" galaw nna, ntsa na nsam ni hpe shapraw kau na matu madung tawn ai. Reaction mechanism hte seng nna, plasma hpe jasan jaseng ai lam hta, lawu na zawn re ai lam ni hpe madung tawn nna galaw ra ai: inorganic gases ni hpe plasma masa de shadut dat ai; gaseous substances ni gaw n-gun ja ai ntsa de shinggrup mat wa ai; adsorbed hpung ni gaw, n-gun ja ai ntsa na molecule ni hte shingdaw nna, product molecule ni hpe byin shangun ai; dai kaw na pru ai molecule ni gaw gas phase de htum mat wa ai; hte reaction ngam ai n-gun ni hpe npu kaw na shaw kau ai.

Plasma jasan jaseng ai hpaji masa hta ahkyak dik ai lam gaw, n-gun n rawng ai n-gun rawng ai arung arai ni, n-gun n rawng ai n-gun rawng ai arung arai ni, n-gun n rawng ai n-gun rawng ai arung arai law malawng ni rai nga ai, polypropylene, polyester, polyimide, polyvinyl chloride, epoxy, polytetrafluoroethylene zawn re ai n-gun rawng ai arung arai ni hpe pyi galaw lu ai. Dai gaw, npu ting hte shara nkau mi hpe mung, grai sawng ai npawt nhpang ni hpe mung jasan jaseng ya lu ai.